Scanning Electron Microscope Facilities

Scanning Electron Microscope (SEM) facilities provide detailed high-resolution images of the sample by rastering a focussed electron beam across the surface and detecting secondary or backscattered electron signals. An Energy Dispersive X-Ray Analyser (EDX) is also used to provide elemental identification and quantitative compositional information.

For access request: AUC internal users, click here.

This group includes the following equipment:

  • LEO Field Emission Scanning Electron Microscope:


Model: Leo Supra 55 


Ultra high resolution at low kV: 1 nm @ 15 kV, 1.7 nm @ 1 kV, 4 nm @ 0.1 kV
Magnification: 20x to 900,000x
Electron gun: thermal field emission type
High-efficiency in-lens detector
Wide operating voltage range: 0.1 kV to 30 kV
Ultra stable high current mode for X-ray analysis and EBSD applications 20 nA/0.2%/h


Analytical tools:

X-ray Analysis:

Model: Oxford Instruments INCA Energy 200 Microanalysis System


  • Qualitative and quantitative X-ray microanalysis from an area on a specimen with automatic and manual peak identification.
  • Acquisition of elemental maps and line-scans
    EBSD (for crystallographic analysis):
    Model: Oxford Instruments INCA Crystal 200 Orientation Imaging System


  • Texture analysis: produce pole figures, inverse pole figures, and ODF (Euler plots), plus diffraction patterns
  • Create and export histograms for grains and misorientation (grain boundary)
  • Map multiple phases


Multi-port analytical specimen chamber 330 mm (Ø) x 270 mm (h)


5" fully motorized eucentric stage 

For reservation:   

AUC Internal Users     External Users

  • Scanning Electron Microscope/EDX:

An Energy Dispersive X-Ray Analyser (EDX) provides elemental identification and quantitative compositional information. 


For reservation:   

AUC Internal Users     External Users

  • Neoscope JCM-6000 Plus _JEOL Benchtop SEM:

Neoscope (JCM-6000 Plus) JEOL Benchtop SEM is a compacted SEM that provides the same functions as the Field Emission SEM but with a much smaller scale compared to FE-SEM (maximum of 60000X), it is also equipped with an EDS detector that performs elemental chemical analysis through X-ray detection technique. JEOL Benchtop SEM is quick and handy, but when samples are in nanoscale. FE-SEM is the proper equipment.

Neoscope Benchtop SEM

For reservation:   

AUC Internal Users     External Users

  • Tensile Stage:

In Situ Tensile Stage applies mechanical tests on samples under SEM where users can observe and record the real time deformation and save them as images. The test results are also provided as graphs and output data files. Mechanical tests performed are Tensile, Compression, 3 points bending and 4 points bending tests; they can also be applied outside of the SEM, in which case results are provided as graphs only.
Basic specifications
Sample size Length 36 to 52mm ( depending on the type of tension stage)
Parallel part Approx. 2mm x 10mm
Specimen thickness 0.5 to 1.0mm
Sample tilt angle 60 ° to 70 °
(pretilt 0 ° or 20 °, SEM stage tilt 50 °)

Maximum tensile load 1500N to 50N (depending on tension stage type)

tensile STAGE 1500 N

 Maximum load 1500N type

For reservation:   

AUC Internal Users     External Users