Scanning Electron Microscope (SEM) Facilities

SEM  Facilities provide detailed high-resolution images of the sample by rastering a focussed electron beam across the surface and detecting secondary or backscattered electron signals. An Energy Dispersive X-Ray Analyser (EDX) is also used to provide elemental identification and quantitative compositional information.

For Access Request: AUC Internal Users, click here 

This group includes the following equipment:

  • LEO Field Emission Scanning Electron Microscope:


  Model: Leo Supra 55 


Ultra high resolution at low kV: 1 nm @ 15 kV, 1.7 nm @ 1 kV, 4 nm @ 0.1 kV
Magnification: 20x to 900,000x
Electron gun: thermal field emission type
High-efficiency in-lens detector
Wide operating voltage range: 0.1 kV to 30 kV
Ultra stable high current mode for X-ray analysis and EBSD applications 20 nA/0.2%/h


Analytical tools:

X-ray Analysis:

Model: Oxford Instruments INCA Energy 200 Microanalysis System


- Qualitative and quantitative X-ray microanalysis from an area on a specimen with automatic and manual peak identification.
- Acquisition of elemental maps and line-scans
EBSD (for crystallographic analysis):
Model: Oxford Instruments INCA Crystal 200 Orientation Imaging System


- Texture analysis: produce pole figures, inverse pole figures, and ODF (Euler plots), plus diffraction patterns.
- Create and export histograms for grains and misorientation (grain boundary).
- Map multiple phases.


Multi-port analytical specimen chamber 330 mm (Ø) x 270 mm (h)



5" fully motorized eucentric stage 

For Reservation:   

AUC Internal Users     External Users

  • Scanning Electron Microscope/ EDX:

An Energy Dispersive X-Ray Analyser (EDX) provides elemental identification and quantitative compositional information. 


For Reservation:   

AUC Internal Users     External Users

  • Neoscope JCM-6000 Plus _JEOL Benchtop SEM:

Neoscope (JCM-6000 Plus) JEOL Benchtop SEM is a compacted SEM that provides the same functions as the Field Emission SEM but with a much smaller scale compared to FE-SEM (maximum of 60000X), it is also equipped with an EDS detector that performs elemental chemical analysis through X-ray detection technique. JEOL Benchtop SEM is quick and handy, but when samples are in nanoscale. FE-SEM is the proper equipment.

Neoscope Benchtop SEM

For Reservation:   

AUC Internal Users     External Users

  • Tensile Stage:

Sample tensile stage for EBSD. The EBSD sample tensile stage is an in-situ observation stage that can apply uniaxial tensile deformation to the sample while performing EBSD observation. In combination with OIM, it is possible to observe the dynamic deformation of the sample.

1. Features
This is a compact EBSD sample tension stage that can be mounted in the same way as a standard sample holder without modifying the SEM stage. The maximum tensile force depends on the size of the tension stage, but it is as high as 1,000 to 2,000N. The customized design of the SEM adapter part is possible so that it can be attached to the stage of each company's SEM. Also, in order to avoid interference with the SEM stage, mount the sample beforehand with a 20 ° inclination, and use the SEM stage with an inclination of about 50 °. OIM can be performed exactly like a normal measurement.
2. Basic specifications
Sample size Length 36 to 52mm ( depending on the type of tension stage)
Parallel part Approx. 2mm x 10mm
Specimen thickness 0.5 to 1.0mm
Sample tilt angle 60 ° to 70 °
(pretilt 0 ° or 20 °, SEM stage tilt 50 °)
Maximum tensile load 1000N to 2000N (depending on tension stage type)

tensile STAGE 1500 N

 Maximum load 1500N type

tensile STAGE 1000 N

 Maximum load 1000N type

3. Basic configuration
The specimen tension stage for EBSD has everything required for experiments, as shown below. (Please specify the SEM to be installed)
One sample tension stage body for EBSD
Sample tensile stage controller one
SEM feed-through flange one
Control PC / Monitor 1 set
Cables 1 set
Traction control software 1 set
Sample mounting parts 1 set
4. Application Examples
The figure below shows the change when the tensile test is performed on the SUS304 annealed material at the tensile stage. OIM measurement is performed by holding the sample under load at each elongation. At about 6% deformation, little change is seen in the IPF crystal orientation map, but it can be seen that it appears as a large change in the KAM crystal orientation difference map. In the case of the 15% deformation, the phase shown in green above is recognized in the phase map shown below, which indicates that the work-induced transformation has occurred.

For Reservation:   

AUC Internal Users     External Users